Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2005-06-04
2009-06-09
Dougherty, Thomas M (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C367S181000
Reexamination Certificate
active
07545075
ABSTRACT:
The embodiments of the present invention provide a CMUT array and method of fabricating the same. The CMUT array has CMUT elements individually or respectively addressable from a backside of a substrate on which the CMUT array is fabricated. In one embodiment, a CMUT array is formed on a front side of a very high conductivity silicon substrate. Through wafer trenches are etched into the substrate from the backside of the substrate to electrically isolate individual CMUT elements formed on the front side of the substrate. Electrodes are formed on the backside of the substrate to individually address the CMUT elements through the substrate.
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Cheng Ching-Hsiang
Ergun Arif S.
Huang Yongli
Khuri-Yakub Butrus T.
Zhuang Xuefeng
Dougherty Thomas M
Perkins Coie LLP
The Board of Trustees of the Leland Stanford Junior University
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