Comb-shaped actuator with off centered electrodes

Details Comb-shaped actuator with off centered electrodes Comb-shaped actuator with off centered electrodes

2007-05-29

2007-05-29

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S223100, C359S225100, C359S291000

Reexamination Certificate

active

11042155

ABSTRACT:
A comb shaped actuator having off centered electrodes to the fixed electrode and the movable electrode comprise a plurality of electrode finger units containing two fixed electrode fingers next to each other and the movable electrode finger interposed between the two fixed electrode fingers, at least two of the electrode finger units comprising off-centered electrode finger units having the movable electrode finger being off-centered with respect to a central position between the two fixed electrode fingers, the off-centered electrode finger units being located on both sides of a central line dividing the fixed electrode and the movable electrode along the opening into two parts, and directions of off-centering of the both sides being inverse to each other.

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Sun et al., “A Novel Dual Axis Electrostatically Microactuation System for Micromanipulation”, Intelligent Robots and Systems, Sep. 30, 2002.
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Uma Krishnamoorthy et al., “Self-Aligned Vertical Electrostatic Combdrives for Micromirror Actuation,” Journal of Microelectromechanical Systems, vol. 12, No. 4, Aug. 1, 2003, pp. 458-464, XP002321505.
European Search Report, EP 05 29 0149, dated Apr. 14, 2005.

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