Centipede actuator motion stage

Details Centipede actuator motion stage Centipede actuator motion stage

2005-02-18

2010-02-16

Tamai, Karl I (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

Reexamination Certificate

active

07663289

ABSTRACT:
A micro electromechanical actuator has movable flaps formed on a base plate. The flaps are detached from the base plate on the ends and along one side, with the opposite side being partially attached to the base plate by flexures. The flaps can be moved upward, rotating or twisting along the axis of the flexure so that a one side contacts a movable element first, followed by the opposite side. As a result, the movable element is moved laterally with respect to the flaps. Movement of the flaps can be by application of a voltage to the flaps, followed by removal of the voltage to return the flaps to their original position. The cycle can continue to move the movable element the desired amount.

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Machine translation, jp 2005-220680, “electrostatic actuator”, Wataru Nakagawa and Michihiko Tsuruoka, Aug. 31, 1993.
Akihiro Koga et al.; “Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera”; Journal of Lightwave Technology, vol. 17, No. 1; p. 43-47; Jan. 1999.

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