Miniature device with translatable member

Modulation in micromachined ultrasonic transducers

Motion based, electrostatic power source and methods thereof

Movable device

Movable MEMS-based noncontacting device

Multi-layer, self-aligned vertical combdrive electrostatic...

Multi-step microactuator providing multi-step displacement...

Multiple axes drive apparatus with electrostatic drive means

Multiple element electrode cMUT devices and fabrication methods

Multiple element electrode cMUT devices and fabrication methods

Multiple mechanical resonator parametric device

Multistable tunable micromechanical resonators

Non-linear actuator suspension for microelectromechanical...

Optical cross-connect switch using electrostatic surface...

Optical element having two axes of rotation for use in...

Optimized energy conversion device

Parallel plate electrostatic actuation of MEMS mirrors

Parametric resonator and filter using the same

Piezoelectric and electrostatic microelectromechanical...

Piezoelectric driven type vibratory feeder