Multiple axes drive apparatus with electrostatic drive means

Details Multiple axes drive apparatus with electrostatic drive means Multiple axes drive apparatus with electrostatic drive means

1996-03-20

1998-01-13

LaBalle, Clayton E.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310 12, H02K 4102, H02N 100

Patent

active

057083193

ABSTRACT:
A multiple axes drive apparatus having a plurality of electrostatic actuators for applying driving forces in a plurality of different directions within a plane to a driven member. Each electrostatic actuator of the drive apparatus includes a first member that has a plurality of first electrode strips arranged in a single direction with a predetermined pitch, and a second member that has a plurality of second electrode strips arranged in the same direction as the first electrode strips with the same pitch. The members are located opposite to each other so one of the members moves along the single direction in response to a Coulomb force generated between the electrode strips when voltage is applied to the electrode strips.

REFERENCES:
patent: 4754185 (1988-06-01), Gabriel et al.
patent: 5055731 (1991-10-01), Nihei et al.
patent: 5239222 (1993-08-01), Higuchi et al.
patent: 5378954 (1995-01-01), Higuchi et al.
patent: 5536988 (1996-07-01), Zhang et al.

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