Multi-step microactuator providing multi-step displacement...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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Details

C359S224100, C359S290000

Reexamination Certificate

active

07898144

ABSTRACT:
A multi-step microactuator is provided with the multiple supports in a stepper plate to give multi-step displacement to a controlled object. The microactuator has advantages such that multiple motion can be applied to the controlled object and that the object can be controlled in a low driving voltage and that simple motion control is applied by digital controlling and that the degrees of freedom in motion of the object can be chosen by the number of the stepper plate and that only single voltage is needed for driving the micromirror motion. With many advantages, the multi-step microactuator provides a solution to overcome the difficulties in controlling multi-step motion.

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