Multistable tunable micromechanical resonators

Details Multistable tunable micromechanical resonators Multistable tunable micromechanical resonators

1997-08-21

1999-06-22

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

H02N 100

Patent

active

059145536

ABSTRACT:
A multistable tunable electromicromechanical resonator structure incorporates electrostatic actuators which permit modification of the resonant frequency of the structure. The actuators consist of sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base or substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure and shifts the structure to a bistable state. Application of an alternating drive signal drives the structure to chaotic oscillation.

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