Microfabricated vertical comb actuator using plastic...

Microfabricated vertical comb actuator using plastic...

Micromachine

Micromachine and method of fabricating the same

Micromachined moving device controlled by a...

Micromachined ultrasonic spiral arrays for medical...

Micromachined ultrasonic transducer cells having compliant...

Micromachined ultrasonic transducer cells having compliant...

Micromechanical actuator with asymmetrically shaped electrodes

Micromechanical device

Micromechanical device having braking mechanism

Micromechanical device with piezoelectric and electrostatic...

Micromechanical electrostatic resonator

Micromechanical platform pivotal on a compliant member

Micromechanical rotation system with coupled actuators

Micromechanical, capacitative ultrasound transducer and...

Micromirror actuator

Micromotion mechanical structure and a process for the productio

Micropositioner systems and methods

Miniature device with bossed suspension member