Miniature device with bossed suspension member

Details Miniature device with bossed suspension member Miniature device with bossed suspension member

2005-04-19

2005-04-19

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C310S012060, C073S504120

Reexamination Certificate

active

06882083

ABSTRACT:
A miniature device comprising a substrate, a movable member overlying the substrate and first and second spaced-apart suspension members. Each of the first and second suspension members has a first bendable end portion coupled to the substrate and a second bendable end portion coupled to the movable member and a substantially rigid central portion. The first and second end portions of each suspension member have respective first and second lengths and the suspension member has an overall length. The sum of the first and second lengths of each suspension member ranges from 5% to 40% of the overall length of the suspension member.

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patent: 6469415 (2002-10-01), Jerman et al.
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patent: 6552839 (2003-04-01), Hong et al.
patent: 6625101 (2003-09-01), Jerman et al.
Hein, Schlichting, Obermeier, “Piezoresistive Silicon Sensor For Very Low Pressures Based on the Concept Of Stress Concentration”, Technical University of Berlin, pp. 628-631.
Henein, Bottinelli, Clavel, “Parallel Spring Stages with Flexures Of Micrometric Cross-Sections”, Swiss Federal Institute of Technology of Lausanne, pp. 209-220, SPIE vol. 3202.
Legtenberg, Groeneveld, Elwenspoek, Comb-drive Actuators for large Displacements, MESA Research Institute, University of Twente, pp. 320-329.

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