Micromachined moving device controlled by a...

Details Micromachined moving device controlled by a... Micromachined moving device controlled by a...

2005-09-06

2005-09-06

Tamai, Karl Eizo (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C318S116000, C385S018000

Reexamination Certificate

active

06940207

ABSTRACT:
A micromachined moving device which has a fixed electrode base plate8and a moving electrode plate2supported by a support frame10through anchor parts23and flexures21and held at a predetermined distance from the fixed electrode base plate8, in which an AC drive voltage from an AC drive circuit60is applied across the fixed electrode base plate8and the moving electrode plate2so to drive by the electrostatic force into contact with the former and hold them in contact.

REFERENCES:
patent: 6140737 (2000-10-01), Boie
patent: 6351054 (2002-02-01), Cabuz et al.
patent: 6608268 (2003-08-01), Goldsmith
patent: 2002/0074896 (2002-06-01), Kasahara
patent: 2004/0032185 (2004-02-01), Kato
patent: 2004/0124073 (2004-07-01), Pillans et al.
patent: 1125357 (2001-08-01), None
patent: 9163761 (1997-06-01), None
patent: 01264650 (2001-09-01), None

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