Micromachine and method of fabricating the same

Details Micromachine and method of fabricating the same Micromachine and method of fabricating the same

2006-09-05

2006-09-05

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

Reexamination Certificate

active

07102268

ABSTRACT:
A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.

REFERENCES:
patent: 6677695 (2004-01-01), Dhuler et al.
patent: 6898972 (2005-05-01), Bauer et al.
patent: 6943419 (2005-09-01), Wong et al.
patent: 2003/0001453 (2003-01-01), Shimanouchi
patent: WO02014787 (2002-02-01), None
Nguyen, MP 4.7 “Tunable, Switchable, High-Q-VHF Microelectromechanical Band Pass filters”, 1999 IEEE International Solid-State Circuit Conference, pp. 78-79.

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