Micromachined ultrasonic transducer cells having compliant...

Details Micromachined ultrasonic transducer cells having compliant... Micromachined ultrasonic transducer cells having compliant...

2006-04-18

2006-04-18

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C600S459000, C367S163000, C367S174000, C381S174000

Reexamination Certificate

active

07030536

ABSTRACT:
A micromachined ultrasonic transducer array comprising a multiplicity of cMUT cells built on a substrate. Each cMUT cell comprises a compliant support structure built on the substrate, a membrane supported over a cavity by the compliant support structure, a first electrode supported by the membrane, and a second electrode that forms a capacitor with the first electrode, the cavity being disposed between the first and second electrodes. The compliant support structure uncouples the non-membrane outer surface of each cMUT cell from the supporting substrate.

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