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Micro-oscillation element incorporating springs

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate

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Microactuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microactuator

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microactuator and method of manufacturing the same

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microactuator with displacement sensing function and...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectricalmechanical system (MEMS) electrical isolator...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical apparatus for elevating and tilting a...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical apparatus for elevating and tilting a...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical ratcheting apparatus

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical system actuator for extended linear...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical system for tilting a platform

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical system with stiff coupling

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechanical transducer and fabrication method

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microelectromechnical system for tilting a platform

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microelectromechnical system for tilting a platform

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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Microfabricated microengine for use as a mechanical drive and po

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microfabricated rotary motion wobble motor and disk drive incorp

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent

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Microfabricated torsional drive utilizing lateral...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
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