Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Patent
1990-11-27
1993-04-27
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
200 1R, 200 5A, 381191, H02N 100
Patent
active
052065570
ABSTRACT:
A microelectromechanical transducer including a plurality of strips arranged in an array and maintained in a closely spaced relation by a plurality of spacers. An electrically conductive layer on portions of the strips and spacers distributes electrical signal within the transducer to cause adjacent portions of the strips to move together. The strips and spacers may be formed from a common dielectric layer using microelectronic fabrication techniques. Two transducers may be coupled at an angle offset from parallel for two-dimensional micropositioning. A photodetector and Fresnel lens may be combined with the micropositioner using the transducers for optical scanning microscopy.
REFERENCES:
patent: 2975307 (1961-03-01), Schroeder et al.
patent: 3008014 (1961-11-01), Williamson et al.
patent: 3153229 (1964-10-01), Roberts
patent: 3315103 (1967-04-01), Duff et al.
patent: 3345469 (1967-10-01), Rod
patent: 3389226 (1968-06-01), Peabody
patent: 3967027 (1976-06-01), Igarashi et al.
patent: 4034332 (1977-07-01), Alais
patent: 4042438 (1977-08-01), Kawakami et al.
patent: 4206369 (1980-06-01), Lewiner et al.
patent: 4207442 (1980-06-01), Freeman
patent: 4342935 (1982-08-01), Kallmeyer et al.
patent: 4384230 (1983-05-01), Wisner
patent: 4510412 (1985-04-01), Suda et al.
patent: 4615591 (1986-10-01), Smith et al.
patent: 4678955 (1987-07-01), Toda
patent: 4721447 (1988-01-01), Erckmann
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4814657 (1989-03-01), Yano et al.
patent: 4841191 (1989-06-01), Takata
patent: 4863252 (1989-09-01), McCarthy et al.
patent: 4897592 (1990-01-01), Hyde
patent: 5001381 (1991-03-01), Watanabe
patent: 5113566 (1992-05-01), Weekamp et al.
"Silicon Micrometchanics: Sensors and Actuators on a Chip"; SPECTRUM, Jul. 1990 Roger T. Howe and Richard S. Muller; University of California at Berkley Kaigham J. Gabriel and William S. N. Trimmer; AT&T Bell Laboratories.
Budd Mark O.
MCNC
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