Microfabricated torsional drive utilizing lateral...

Details Microfabricated torsional drive utilizing lateral... Microfabricated torsional drive utilizing lateral...

2006-02-28

2006-02-28

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S291000, C359S223100, C359S224200

Reexamination Certificate

active

07005775

ABSTRACT:
The present invention is related to a novel micro-electro-mechanical systems (MEMS) torsional drive that is capable of tilting suspended structure such as a micro-mirror for steering light beams in three-dimensional analog fashion, which is suitable for high port count optical switches. The torsional drive has the advantages of allowing large tilt angle, having low drive voltage, and capable of providing a feedback signal for closed-loop control.

REFERENCES:
patent: 4922756 (1990-05-01), Henrion
patent: 5756901 (1998-05-01), Kurle et al.
patent: 6000280 (1999-12-01), Miller et al.
patent: 6135423 (2000-10-01), Johnson
patent: 6629461 (2003-10-01), Behin et al.
patent: 2005/0002084 (2005-01-01), Wan
patent: 2000-147419 (2000-05-01), None
English translation of 2000-147419. May 2000, Izeki et al.

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