Method and subsystem for processing signals utilizing a...

Method and system for securing and controlling an...

Method and system using liquid dielectric for electrostatic...

Method for driving micro-oscillating element having...

Method for operating a microelectromechanical system using a...

Method for supplying multiple voltages to a movable part of...

Method of actuating MEMS switches

Method of driving an electrostatic actuator

Method of driving an electrostatic actuator with...

Method to prevent charging effects in electrostatic devices

Methods and apparatus for diffractive optical processing...

Micro actuator

Micro actuator having tilt and vertical displacement and...

Micro electro mechanical system using comb and parallel...

Micro mechanical component and production process thereof

Micro motors and method for their fabrication

Micro oscillating comb tooth element with two interesecting...

Micro oscillating element

Micro-actuator

Micro-actuator array, micro-actuator device, optical switch,...