Method for supplying multiple voltages to a movable part of...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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C318S116000

Reexamination Certificate

active

07015620

ABSTRACT:
Two or more independent voltages are applied between stationary and movable parts of a MEMS device via a multipart spring having at least two cooperating parts that are not in direct electrical contact with each other. In one embodiment, the at least two cooperating parts include a first cooperating part and one or more other cooperating parts that are physically separated from the first cooperating part, wherein first and second independent voltages are applied via the first cooperating part and the one or more other cooperating parts, respectively.

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