Micro actuator

Details Micro actuator Micro actuator

1994-04-26

1996-02-06

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310323, 310328, H02N 200, B23Q 1600

Patent

active

054898129

ABSTRACT:
A device for providing micro positioning having an operating range in the submicron order in the X and Y directions, respectively. Positioning is achieved by a device which includes a driving section bonded to a silicon wafer for applying a driving force to excite vertical motion, and a mechanism for converting this vertical motion into rotational motion. Three types of micro actuators are described herein: one, that uses vibration as its driving force; a second, that uses Coulomb's force; and a third, that utilizes fluid pressure, such as air.

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Array-Driven Ultrasonic Microactuators, by Fujita et al. 1991 IEEE.
H. Seidel, et al., "Capacitive Silicon Accelerometer with Highly Symmetrical Design", Transducert '89 Lecture No. B10.4, Jun. 1989.
K. Ikeda, et al., "Silicon Pressure Sensor Integrates Resonant Strain Gauge on Diaphragm", Transducers '89 Lecture No. B4.3, Jun. 1989.

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