Method for operating a microelectromechanical system using a...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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C385S018000, C359S223100, C359S198100

Reexamination Certificate

active

06864618

ABSTRACT:
A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.

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patent: 6253001 (2001-06-01), Hoen
patent: 6283601 (2001-09-01), Hagelin et al.
patent: 6621681 (2003-09-01), Rodgers et al.
patent: 6640023 (2003-10-01), Miller et al.
patent: 20010048265 (2001-12-01), Miller et al.
patent: 6-160750 (1994-06-01), None

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