MEMS scanner with dual magnetic and capacitive drive

Details MEMS scanner with dual magnetic and capacitive drive MEMS scanner with dual magnetic and capacitive drive

2006-07-04

2006-07-04

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S225100, C359S291000

Reexamination Certificate

active

07071594

ABSTRACT:
A MEMS scanning device includes more than one type of actuation. In one approach capacitive and magnetic drives combine to move a portion of the device along a common path. In one such structure, the capacitive drive comes from interleaved combs. In another approach, a comb drive combines with a pair of planar electrodes to produce rotation of a central body relative to a substrate. In an optical scanning application, the central body is a mirror. In a biaxial structure, a gimbal ring carries the central body. The gimbal ring may be driven by more than one type of actuation to produce motion about an axis orthogonal to that of the central body. In another aspect, a MEMS scanning device is constructed with a reduced footprint.

REFERENCES:
patent: 5467104 (1995-11-01), Furness et al.
patent: 5557444 (1996-09-01), Melville et al.
patent: 5629790 (1997-05-01), Neukermans et al.
patent: 5648618 (1997-07-01), Neukermans et al.
patent: 5694237 (1997-12-01), Melville
patent: 5701132 (1997-12-01), Kollin et al.
patent: 5767666 (1998-06-01), Asada et al.
patent: 5867297 (1999-02-01), Kiang et al.
patent: 5912608 (1999-06-01), Asada
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 6122394 (2000-09-01), Neukermans et al.
patent: 6140979 (2000-10-01), Gerhard et al.
patent: 6245590 (2001-06-01), Wine et al.
patent: 6262827 (2001-07-01), Ueda et al.
patent: 6285489 (2001-09-01), Helsel et al.
patent: 6595055 (2003-07-01), Schenk et al.
patent: 2000-147419 (2000-05-01), None
patent: WO025170 (2003-02-01), None
Conant, Nee, Lau and Muller, “A Fast Flat Scanning Micromirror,” 2000 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, Jun. 2000, pp. 6-9.
Conant, Nee, Lau and Muller, “Dynamic Deformation of Scanning Micromirrors,” presented at IEEE/LEOS Optical MEMS 2000, Kauai, Hawaii, Aug. 2000.
Urey, Dewitt, Lopez, Tauscher, “MEMS Sinusoidal Raster Correction Scanner for SXGA Retinal Scanning /display,” MOEMS Display and Imaging Systems, Proc. SPIE vol. 4985, San Jose, CA, Jan. 2003.
Urey, Dewitt, Powell, Bayer, “High-Frequency Raster Pinch correction Scanner for Retinal Scanning Displays,” MOEMS and Miniaturized Systems, SPIE vol. 4561, San Francisco, CA, Oct. 2001.
Asada, et al. “Silicon Micromachined Two-Dimensional Glavano Optical Scanner,” IEEE Transactions on Magnetics, vol. 30, No. 6, 4647-4649, Nov. 1994.
Kiang, et al., “Micromachined Microscanner for Optical Scanning,” SPIE proceedings on Miniaturized Systems with Micro-Optics and Micromachines II, vol. 3008, Feb. 1997, pp. 82-90.

Affiliated with

Also associated with

Rating

MEMS scanner with dual magnetic and capacitive drive does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS scanner with dual magnetic and capacitive drive, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS scanner with dual magnetic and capacitive drive will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3575075