Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2011-01-18
2011-01-18
Tamai, Karl I (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C359S225100, C359S291000, C257S414000, C216S006000
Reexamination Certificate
active
07872394
ABSTRACT:
In certain embodiments, a MEMS actuator is provided comprising a frame and a movable structure coupled to the frame. A vertical comb drive is provided between the frame and the movable structure to actuate the movable structure.
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Bang Christopher A.
Chen Richard
Fan Li
Gritters John
Klaassen Erno
Ford Joseph E
Ross John R.
Tamai Karl I
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