Machine structures fabricated of multiple microstructure layers

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

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310306, 310308, 310 40MM, 216 33, H01L 4108

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active

059558180

ABSTRACT:
Machine structures each comprising a stack of a plurality of micromachine layers laminated together are presented, along with fabrication methods therefore. Each machine structure includes a movable member(s) defined from microstructure of at least one layer of the plurality of micromachine layers comprising the stack. During fabrication, the micromachine layers are separately formed using VLSI techniques and then subsequently laminated together in a selected arrangement in the stack to define the machine structure.

REFERENCES:
patent: 4740410 (1988-04-01), Muller et al.
patent: 4761210 (1988-08-01), Ehrler et al.
patent: 4893042 (1990-01-01), Tamaka
patent: 4928029 (1990-05-01), Wright
patent: 4943750 (1990-07-01), Howe et al.
patent: 4997521 (1991-03-01), Howe et al.
patent: 5001381 (1991-03-01), Watanabe
patent: 5202754 (1993-04-01), Bertin et al.
patent: 5266859 (1993-11-01), Stanley
patent: 5270261 (1993-12-01), Bertin et al.
patent: 5315751 (1994-05-01), Hammer
patent: 5426566 (1995-06-01), Beilstein, Jr. et al.
patent: 5493156 (1996-02-01), Okada
patent: 5576147 (1996-11-01), Guckel et al.
patent: 5649349 (1997-07-01), Greenway
patent: 5710466 (1998-01-01), Allen et al.
Witek, K.E., et al., "A Method For Assembling Micromechanical Devices Using One of Magnetic Field Or Liquid Surface Tension", Jul. 1995, Motorola Technical Developments, pp. 97-104.
Harmening, M., et al., "Molding of Threedimensional Microstructures By The LIGA Process", 1992 IEEE Catalog No. 92CH3093-2, Micro Electro Mechanical Systems, '92, pp. 202-207.
Jacobsen, S. C., et al., "A Design Overview of an Eccentric-motion Electrostatic Microactuator (the Wobble Motor)", Nov. 15, 1989, 8253 Sensors and Actuators/Elsevier Sequoia, pp. 1-16.
Ogura, H., et al., "A Concentric Build-up Process to Fabricate Practical Wobble Motors", Jan. 25, 1994, Matsushita Research Institute Tokyo, Inc., pp. 114-118.
Suhir, E., "Double-Sided "Velcro-Type" Input/Output Contactor Interface Design: Mechanical Behavior of Elastic Contactors," Journal of Electronic Packaging, vol. 112, pp. 383-386, Dec. 1990.
Han et al., "A Mchanical Surface Adhesive Using Micromachined Silicon Structures," J. Micromech. Microeng. 1, pp. 30-33, 1991.
Uzoh, C. E., "Accelerated Etching of Silicon in Anisotropic Ethylene Diamine-Water-Pyrazine-Pyrocathecol Bath," IBM Technical Disclosure Bulletin, vol. 31, No. 7, pp. 420-422, Dec. 1988.
Lehr, H., et al., "LIGA components for the construction of milliactuators," 1994 IEEE Symposium on Emerging Technologies and Factory Automation, pp. 43-47, Nov. 1994.
"Integrated Notched Pin Joint and other Multilayer Structures with Extended High-Aspect Ratio Gaps and Method of Fabrication Thereof," IBM Tech. Discl. Bulletin, vol. 38, No. 04, Apr. 1995, pp. 593-596.

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