Method and apparatus for an actuator system with integrated...

Details Method and apparatus for an actuator system with integrated... Method and apparatus for an actuator system with integrated...

2006-11-21

2006-11-21

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S224200, C359S290000

Reexamination Certificate

active

07138745

ABSTRACT:
An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of the flexures results substantially from variations in intrinsic residual stress within the flexures. In one embodiment the apparatus is a deformable mirror exhibiting low temperature-dependence, high stroke, high control resolution, large number of degrees of freedom, reduced pin count and small form-factor. Structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range. Methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small-form-factor deformable mirror.

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Machine translation of jp 2001-249285.
Helmbrecht et al., “Micromirrors for Adaptive-Optics Arrays”, Jun. 10, 2001, Transducers'01 EUROSENSORS XV.

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