Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating
Reexamination Certificate
2011-04-19
2011-04-19
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Charge accumulating
C361S278000
Reexamination Certificate
active
07928632
ABSTRACT:
This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.
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Dougherty Thomas M
Kilpatrick Townsend and Stockton LLP
MCube Inc.
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