Surface discharge plasma cathode electron beam generating assemb

Surface wave plasma processing apparatus

Surface wave plasma processing system and method of using

System and method for adjusting the orbit of an orbiting...

System and method for generating a discharge in high...

System and method for generating ions and radicals

System and method for inductive coupling of an expanding...

System and method for initiating plasma production

System for high power RF plasma processing

System for ion energy control during plasma processing

Systems and methods for ion source control in ion implanters

Tandem hall field plasma accelerator

Termination of secondary frequencies in RF power delivery

Thin magnetron structures for plasma generation in ion...

Three chamber negative ion source

Three-phase alternating current plasma generator

Transducer package for process control

Transducer package for process control

Transformer ignition circuit for a transformer coupled...

Transformer ignition circuit for a transformer coupled...