System and method for generating ions and radicals

Details System and method for generating ions and radicals System and method for generating ions and radicals

2006-11-09

2009-06-23

Owens, Douglas W (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

C315S111910

Reexamination Certificate

active

07550927

ABSTRACT:
A system and method for producing electrons and ions are disclosed. One embodiment includes an outer electrode with a discharge chamber; an inner electrode positioned inside the discharge chamber, the inner electrode positioning forming a upper portion of the discharge chamber and a lower portion of the discharge chamber; and a gas inlet positioned in the lower portion of the discharge chamber; wherein a plasma formed within the lower portion of the discharge chamber provides priming particles usable to form a plasma in the upper portion of the discharge chamber.

REFERENCES:
patent: 6610959 (2003-08-01), Carlson et al.
patent: 6670766 (2003-12-01), Yamazaki et al.
patent: 6872909 (2005-03-01), Holber et al.
patent: 6878930 (2005-04-01), Willoughby et al.
patent: 7074370 (2006-07-01), Segal et al.
patent: 7183559 (2007-02-01), Luten et al.
patent: 2003/0157000 (2003-08-01), Janssen et al.

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