Three chamber negative ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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31511191, 31511131, 31511141, 3133621, 3133631, 250424, 250427, H01J 2702

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045594775

ABSTRACT:
A negative ion vessel is divided into an excitation chamber, a negative ionization chamber and an extraction chamber by two magnetic filters. Input means introduces neutral molecules into a first chamber where a first electron discharge means vibrationally excites the molecules which migrate to a second chamber. In the second chamber a second electron discharge means ionizes the molecules, producing negative ions which are extracted into or by a third chamber. A first magnetic filter prevents high energy electrons from entering the negative ionization chamber from the excitation chamber. A second magnetic filter prevents high energy electrons from entering the extraction chamber from the negative ionizing chamber. An extraction grid at the end of the negative ion vessel attracts negative ions into the third chamber and accelerates them. Another grid, located adjacent to the extraction grid, carries a small positive voltage in order to inhibit positive ions from migrating into the extraction chamber and contour the plasma potential. Additional electrons can be suppressed from the output flux using ExB forces provided by magnetic field means and the extractor grid electric potential.

REFERENCES:
patent: 4140943 (1979-02-01), Ehlers
patent: 4377773 (1983-03-01), Hershcovitch et al.
patent: 4407705 (1983-10-01), Garscadden et al.
patent: 4447732 (1984-05-01), Leung et al.
patent: 4486665 (1984-12-01), Leung et al.
Ehlers et al., "Multicusp Negative Ion Source", Rev. Sci. Instrum., vol. 51, No. 6, Jun. 1980, pp. 721-727.
Ehlers et al., "Electron Suppression in a Multicusp Negative Ion Source", Appl. Phys. Lett., vol. 38, No. 4, Feb. 1981, pp. 287-289.
Leung et al., "H.sup.- Ion Formation from a Surface Conversion Type Ion Source", J. Appl. Phys., vol. 52, No. 6, Jun. 1981, pp. 3905-3911.
Leung et al., "Self Extraction Negative Ion Source", Rev. Sci. Instrum., vol. 53, No. 6, Jun. 1982, pp. 30-36.
Leung et al., "Extraction of Volume-Produced H.sup.- Ions from a Multicusp Source", Lawrence Berkeley Lab, University of California preprint, Aug. 1982.

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