Transducer package for process control

Details Transducer package for process control Transducer package for process control

2008-03-18

2008-03-18

Owens, Douglas W. (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C118S7230IR, C324S076110

Reexamination Certificate

active

10668398

ABSTRACT:
A system (10) is provided herein for monitoring the harmonic content of the RF signal delivered to an RF powered device (13). The system comprises (a) a voltage transducer (16) adapted to sample the voltage of the RF signal and to output a first signal representative thereof, (b) a current transducer (17) adapted to sample the current of the RF signal and to output a second signal representative thereof, and (c) a memory device (67) in communication with at least one, and preferably both, of the aforementioned transducers16and17and which contains calibration information specific to the transducers.

REFERENCES:
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patent: 5116482 (1992-05-01), Setoyama et al.
patent: 5343404 (1994-08-01), Girgis
patent: 5565737 (1996-10-01), Keane
patent: 5587630 (1996-12-01), Dooley
patent: 6046594 (2000-04-01), Mavretic
patent: 6535785 (2003-03-01), Johnson et al.
patent: 6791274 (2004-09-01), Hauer et al.

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