Scalable helicon wave plasma processing device with a non-cylind

Scanned electron cyclotron resonance plasma source

Section of pipe for a gas treatment device and device...

Segmented gate drive for dynamic beam shape correction in...

Selective ion source

Selectively controllable gas feed zones for a plasma reactor

Self-balancing circuit for convection air ionizers

Semiconductor processing apparatus

Semiconductor wafer treating device utilizing a plasma

Shielded rf antenna

Shutter linkage for an ion implantation apparatus

Simultaneous discharge apparatus

Slotted waveguide structure for generating plasma discharges

Slow-wave induction plasma transport

Solenoid and monocusp ion source

Source and method for generating high-density plasma with induct

Source for the generation of large area pulsed ion and electron

Source of charged particles beam

Source of liquid metal ions and a method for controlling the...

Spark gap control