Plasma etching apparatus utilizing plasma confinement

Plasma excitation coil

Plasma excitation coil

Plasma filter

Plasma generating apparatus

Plasma generating apparatus

Plasma generating apparatus

Plasma generating apparatus

Plasma generating apparatus and ion source using the same

Plasma generating apparatus and method using modulation system

Plasma generating apparatus and semiconductor manufacturing...

Plasma generating apparatus having an electrostatic shield

Plasma generating apparatus using magnets and method

Plasma generating apparatus, plasma generating method and...

Plasma generating device

Plasma generating device with hairpin-shaped cathode filaments

Plasma generation and confinement with continuous wave lasers

Plasma generation and plasma processing of materials

Plasma generation apparatus with interleaved electrodes and corr

Plasma generation by mode-conversion of RF-electromagnetic...