Plasma generating apparatus

Details Plasma generating apparatus Plasma generating apparatus

1991-09-12

1992-12-22

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 31323131, 20429816, 20429837, 20429838, H05H 118

Patent

active

051736411

ABSTRACT:
A plasma generating appartus according to the present invention generates a plasma by cyclotron movement of electrons. The apparatus features microwave introducing guides for introducing microwaves, a reaction chamber in which a plasma is generated based on introduced microwaves, a magnetic field generating section, and solenoid coils. The magnetic field generating section features at least a pair of magnetic poles having mutually facing concave surfaces, and a yoke for coupling the magnetic poles to constitute a loop of magnetic force lines. The magnetic poles are arranged to face each other with the microwave introducing guides and the reaction chamber interposed, and the magnetic poles generate a magnetic field of a predetermined magnetic flux density consisting of magnetic force lines directed vertically to a major surface of a sample placed on a support table in the reaction chamber. The solenoid coils can vary the magnetic field of a predetermined magnetic flux density generated by the magnetic field generating section to a magnetic field of a desired magnetic flux density.

REFERENCES:
patent: 4987346 (1991-01-01), Katzschner et al.
patent: 4990229 (1991-02-01), Campbell et al.
patent: 5022977 (1991-08-01), Matsuoka et al.
patent: 5032202 (1991-07-01), Tsai et al.
patent: 5053678 (1991-10-01), Koike et al.

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