Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent
1993-07-27
1995-04-04
Pascal, Robert J.
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Electron or ion source
31511121, 31511131, 31511171, 361230, 361235, H01J 724
Patent
active
054040795
ABSTRACT:
On the inner surface of a chamber are circumferentially disposed three lateral electrodes at regular intervals. To the lateral electrodes are applied three high-frequency electric powers of 50 MHz, each differing in phase by approximately 120.degree.. On the bottom of the chamber is placed a sample stage serving as a second electrode, around which is provided a ring-shaped earth electrode. To the sample stage is applied high-frequency electric power of 13.56 MHz. The distance between each of the three lateral electrodes and the earth electrode is longer than the distance between the sample stage and the earth electrode.
REFERENCES:
patent: 5272417 (1993-12-01), Ohmi
patent: 5273609 (1993-12-01), Moslehi
Kubota Masafumi
Nakayama Ichiro
Nomura Noboru
Ohkuni Mitsuhiro
Tamaki Tokuhiko
Matsushita Electric - Industrial Co., Ltd.
Pascal Robert J.
Ratliff Reginald A.
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