Plasma generation apparatus with interleaved electrodes and corr

Details Plasma generation apparatus with interleaved electrodes and corr Plasma generation apparatus with interleaved electrodes and corr

1994-08-26

1996-08-06

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511171, 31511191, 31323101, 31323131, H01J 724

Patent

active

055436889

ABSTRACT:
A plasma generator having two groups of interleaved electrodes to which power is allied at high or radio frequency, to form a plasma in a region sufficiently removed from a substrate to avoid damage and unwanted exposure of the substrate to the plasma. In one embodiment of the invention, the electrodes are flat parallel plates. One group of electrodes includes all the odd-numbered plates and the other group includes all the even-numbered plates. In another embodiment of the invention, the electrodes are concentric cylinders instead of flat plates. In either case, plasma generation makes use of a relatively large electrode surface area in a small volume, and the resulting plasma is not in direct contact with the substrate being processed.

REFERENCES:
patent: 4786352 (1988-11-01), Benzing
patent: 5053678 (1991-10-01), Koike et al.
patent: 5173641 (1992-12-01), Imahashi et al.

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