Plasma generating apparatus using magnets and method

Details Plasma generating apparatus using magnets and method Plasma generating apparatus using magnets and method

1986-04-07

1988-02-23

Chatmon, Saxfield

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511171, 31511181, 3133621, 31323131, H01J 724, H05B 3126

Patent

active

047272937

ABSTRACT:
An improved ion generating apparatus for producing a plasma disk using magnets 34 and 35 around a region 16 in a chamber 15 positioned in a microwave cavity is described. The apparatus is particularly operated at a microwave frequency such that electron cyclotron resonance is produced in the plasma to create an accelerating surface for the electrons around and inside of the plasma. The apparatus can be operated to treat an article 100 in the plasma or a holder 39, with a grid 51 to withdraw particles or with a magnets 47 around an opening 48 forming a nozzle which with electron cyclotron resonance produces a neutral beam of charged particles. The apparatus is particularly useful as a plasma source especially for oxidation, etching and deposition.

REFERENCES:
patent: 3230418 (1966-01-01), Dandl et al.
patent: 4507588 (1985-03-01), Asmussen et al.
patent: 4559477 (1985-12-01), Leung et al.
patent: 4585668 (1986-04-01), Asmussen et al.
patent: 4598231 (1986-07-01), Matsuda et al.
patent: 4611121 (1986-09-01), Miyamura et al.
patent: 4630566 (1986-12-01), Asmussen et al.
patent: 4631438 (1986-12-01), Jacquot

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