Plasma generation and plasma processing of materials

Details Plasma generation and plasma processing of materials Plasma generation and plasma processing of materials

1997-01-09

1998-06-16

Lee, Benny

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 21912152, 21912136, 219123, H01J 724

Patent

active

057676275

ABSTRACT:
A plasma generation system includes one or more pairs of electrode units. Each electrode unit emits a plasma carrying gas along a respective axis. Each pair of electrode units is connected to an electric power supply that creates an electric discharge through the gas jets emitted by the two units. The axes of the two units define a "basic" plane. Each unit is associated with a magnetic circuit having two poles on the opposite sides of the basic plane. Each of these circuits is used to move the plasma gas jet emitted by the respective unit towards or away from the plasma jet emitted by the other unit of the pair of units. Therefore, these circuits control the angle at which the plasma jets meet. In addition, for each pair of the electrode units, a three-pole magnetic circuit is provided to move the plasma jets perpendicularly to the basic plane. The three poles of the magnetic circuit extend substantially along the basic plane. The three poles include a "first" pole, a "second" pole, and "middle" pole between the first and second poles. One of the plasma jets is controlled by the magnetic field passing through the first and middle poles, and the other plasma jet is controlled by the magnetic field passing through the second and middle poles.

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Kulik, P.P., "Dinamicheskaya Plazmennaya Obrabotka (DPO) Poverhnosti Tverdogo Tela", Institut Neftehimicheskogo Sinteza im. A.V. Topchieva, Plazmohimiya-87 (USSR, 1987), Part 2, pp. 4-13.
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