Thin magnetron structures for plasma generation in ion...
Three-phase alternating current plasma generator
Transducer package for process control
Transducer package for process control
Transformer ignition circuit for a transformer coupled...
Transformer ignition circuit for a transformer coupled...
Triggering device for a vacuum arc in a plasma centrifuge
Two-stage hall effect plasma accelerator including plasma...
Vacuum plasma processor having coil with added conducting segmen
Vacuum plasma processor having coil with intermediate...
VHF/UHF reactor system
Wafer area pressure control
Wafer area pressure control for plasma confinement
Wide area source of multiply ionized atomic or molecular species
Wire ion plasma gun
Wire-ion-plasma electron gun employing auxiliary grid