Method of making a physically and chemically active...
Method of manufacturing cathode for plasma etching apparatus usi
Method of obtaining electric discharge and device for effecting
Method of processing materials using an inductively coupled plas
Method of producing flat ECR layer in microwave plasma device an
Method of producing short-wave radiation from a...
Method of sustaining a radial electric field and poloidal plasma
Method to affect spatial distribution of harmonic generation...
Methods and apparatus for calibration and metrology for an...
Methods and apparatus for calibration and metrology for an...
Methods and apparatus for generating high-density plasma
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for generating strongly-ionized...
Methods and apparatus for igniting and sustaining...
Methods and apparatus for optimizing a substrate in a plasma...
Methods and apparatus for pre-stabilized plasma generation for m