Superconducting device for injection of electrons into electron
Surface discharge plasma cathode electron beam generating assemb
System and method for adjusting the orbit of an orbiting...
System and method for generating ions and radicals
Systems and methods for ion source control in ion implanters
Three chamber negative ion source
Unbalanced ion source
Uniform insulation applied-B ion diode
Universal cold-cathode type ion source with closed-loop electron
Vacuum gauge
Vapor and ion source
Wafer holding apparatus for ion implantation
Waveguide and microwave ion source equipped with the waveguide
Wide area VUV lamp with grids and purging jets