4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
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Wafer holding apparatus for ion implantation

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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Waveguide and microwave ion source equipped with the waveguide

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Wide area VUV lamp with grids and purging jets

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Patent

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