Waveguide and microwave ion source equipped with the waveguide

Details Waveguide and microwave ion source equipped with the waveguide Waveguide and microwave ion source equipped with the waveguide

2007-01-23

2007-01-23

Hassanzadeh, Parviz (Department: 1763)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

C118S7230MW, C315S111810, C250S3960ML, C250S42300F

Reexamination Certificate

active

10698673

ABSTRACT:
A waveguide of the present invention comprises a waveguide main body made of a material selected from a boron nitride or an aluminum oxide, and a thin film made of a titanium nitride to cover an outer peripheral surface of the waveguide main body. The waveguide of the present invention can efficiently guide an electromagnetic wave such as a microwave, and has high physical and chemical durability.

REFERENCES:
patent: 4446558 (1984-05-01), Sepp et al.
patent: 4952273 (1990-08-01), Popov
patent: 5359177 (1994-10-01), Taki et al.
patent: 5568304 (1996-10-01), Baur
patent: 6184624 (2001-02-01), Inouchi
patent: 6204560 (2001-03-01), Daetwyler et al.
patent: 2004/0042736 (2004-03-01), Capewell et al.
patent: 2005/0063659 (2005-03-01), Jansen
patent: 62-278802 (1987-12-01), None
patent: 05129802 (1993-05-01), None
patent: 08-190997 (1996-07-01), None
patent: 09-198937 (1997-07-01), None
patent: 10-070112 (1998-03-01), None
patent: 00-077335 (2000-03-01), None

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