Vapor and ion source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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Details

31511121, 31511141, 31323131, 250423R, H01J 2702

Patent

active

050251945

ABSTRACT:
A vapor and ion source includes, in a low pressure chamber, an anode (M), a cathode (K) and a device (A) for applying a magnetic field (B). The cathode (K) is an equipotential cavity (10) provided with an aperture (11) in a front plate. A magnetic field (B) orthogonal to the front plate is applied thereto. The material to be ionized (15) is arranged inside the cavity.

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patent: 3411035 (1968-11-01), Necker et al.
patent: 3414702 (1968-12-01), Stauffer
patent: 4780642 (1988-10-01), Jacquot
patent: 4886992 (1989-12-01), Menet et al.
V. A. Saenko et al., "Metal-Ion Source with Hot Hollow Cathode," Instruments and Experimental Techniques, vol. 30, No. 1, part 2, Jan.-Feb. 1987, pp. 168-170, Plenum Publishing Corp., New York.
V. A. Saenko et al., "Plasma Evaporator" Instruments and Experimental Techniques, vol. 26, No. 4, part 2, Jul.-Aug. 1983, pp. 926-928, Plenum Publishing Corp., New York.
M. Mingxtu et al., "A Hollow Cold Cathode Multipurpose Ion Source," Nuclear Instruments and Methods in Physics Research/Section B, vol. B21, Nos. 2-4, Mar. 22, 1987, pp. 182-185, North-Holland Publishing Amsterdam.
J. H. Freeman et al., "The Technology and Chemistry of Heavy Ion Sources," Nuclear Instruments and Methods, vol. 107, No. 3, Mar. 15, 1973, pp. 477-492, North-Holland Publishing Co., Amsterdam.

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