Cathode arc source with target feeding apparatus
Charged-particle source, control system and process using...
Charged-particle source, control system, and process using gatin
Coaxial cavity type, radiofrequency wave, plasma generating appa
Coaxial electromagnetic wave injection and electron cyclotron re
Cold cathode ion beam deposition apparatus with segregated...
Cold cathode ion beam deposition apparatus with segregated...
Cold-cathode ion source
Cold-cathode ion source with a controlled position of ion beam
Cold-cathode ion source with propagation of ions in the electron
Cold-cathode, ion-generating and ion-accelerating universal devi
Compact plug connectable ion source
Corona discharge air transporting arrangement
Corrugated style anode element for ion pumps