Segmented gate drive for dynamic beam shape correction in...
Selective ion source
Self-balancing circuit for convection air ionizers
Shutter linkage for an ion implantation apparatus
Source of charged particles beam
Source of liquid metal ions and a method for controlling the...
Stabilized radial pseudospark switch
Substrate support structure for ion implantation device
Superconducting device for injection of electrons into electron
Surface discharge plasma cathode electron beam generating assemb
System and method for adjusting the orbit of an orbiting...
System and method for generating ions and radicals
Systems and methods for ion source control in ion implanters