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Low-frequency bias power in HDP-CVD processes

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Low-mass susceptor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Low-pressure apparatus for carrying out steps in the...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Low-pressure CVD apparatus and method of manufacturing a...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Low-pressure processing device

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Lower electrode design for higher uniformity

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Lower liner with integrated flow equalizer and improved...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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LPCVD reactor for high efficiency, high uniformity deposition

Coating apparatus – Gas or vapor deposition
Patent

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