Low-mass susceptor

Details Low-mass susceptor Low-mass susceptor

1996-03-26

2000-07-11

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118728, 118729, 118500, C23C 1600

Patent

active

060866802

ABSTRACT:
A wafer susceptor for semiconductor processing devices, having a thermal mass which is close to that of the wafer. The similarity between the thermal masses of the susceptor and wafer enables a higher throughput and reduces temperature uniformities across the wafer. The low-mass susceptor may be made of a solid, thin disk with or without a central wafer support recess. A wafer temperature sensing aperture may be provided in the center of the susceptor. Alternatively, a low-mass susceptor is formed with an open-celled silicon carbide foam, with or without a thin skin of solid silicon carbide on the top forming a wafer support surface, or completely encapsulating the open-celled foam. The wafer is preferably supported on a plurality of pins extending upward from the susceptor. In a third embodiment, an ultra low-mass susceptor is formed as a ring with a central throughbore and a surrounding wafer support shelf below an outer ledge.

REFERENCES:
patent: 3407783 (1968-10-01), Capita
patent: 3549847 (1970-12-01), Clark et al.
patent: 3641974 (1972-02-01), Yamada et al.
patent: 4522149 (1985-06-01), Garbis et al.
patent: 4560420 (1985-12-01), Lord
patent: 4710428 (1987-12-01), Tamamizu et al.
patent: 4958061 (1990-09-01), Wakabayashi et al.
patent: 4978567 (1990-12-01), Miller
patent: 4990374 (1991-02-01), Keeley et al.
patent: 5033407 (1991-07-01), Mizuno et al.
patent: 5044943 (1991-09-01), Bowman et al.
patent: 5098198 (1992-03-01), Nulman
patent: 5108792 (1992-04-01), Anderson et al.
patent: 5119540 (1992-06-01), Kong et al.
patent: 5119541 (1992-06-01), Ohmi et al.
patent: 5121531 (1992-06-01), Severts et al.
patent: 5156820 (1992-10-01), Wong et al.
patent: 5199483 (1993-04-01), Bahng
patent: 5200157 (1993-04-01), Toya et al.
patent: 5298465 (1994-03-01), Levy
patent: 5306699 (1994-04-01), Eddy
patent: 5308645 (1994-05-01), Zachman et al.
patent: 5332442 (1994-07-01), Kubodera et al.
patent: 5343938 (1994-09-01), Schmidt
patent: 5354715 (1994-10-01), Wang et al.
patent: 5356486 (1994-10-01), Sugarman et al.
patent: 5370739 (1994-12-01), Foster
patent: 5383971 (1995-01-01), Selbrede
patent: 5393349 (1995-02-01), Ohkase
patent: 5403401 (1995-04-01), Haafkens et al.
patent: 5444217 (1995-08-01), Moore
patent: 5456757 (1995-10-01), Aruga et al.
patent: 5467220 (1995-11-01), Xu
patent: 5492566 (1996-02-01), Sumnitsch
patent: 5514439 (1996-05-01), Sibley
patent: 5527393 (1996-06-01), Sato
patent: 5549756 (1996-08-01), Sorensen
patent: 5551985 (1996-09-01), Brors et al.
patent: 5558717 (1996-09-01), Zhao
patent: 5645646 (1997-07-01), Beinglass et al.
patent: 5656093 (1997-08-01), Burkhart et al.
patent: 5683518 (1997-11-01), Moore et al.
patent: 5700725 (1997-12-01), Hower et al.
patent: 5738165 (1998-04-01), Imai
patent: 5803977 (1998-09-01), Tepman
"Shaping the Future in Semiconductor Processing," advertisment, Ceramic Solutions, vol. 73, No. 7, Jul. 1994; attached advertisements (circa 1993) .

Affiliated with

Also associated with

Rating

Low-mass susceptor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low-mass susceptor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low-mass susceptor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-537907