4. Coating apparatus
  5. Gas or vapor deposition
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Dual substrate loadlock process equipment

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Dual substrate loadlock process equipment

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Dynamic blending gas delivery system and method

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Dynamic film thickness control system/method and its...

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Reexamination Certificate

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