4. Coating apparatus
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Vertical heat treatment device for semiconductor

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical oven with a boat for the uniform treatment of wafers

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical type vapor-phase growth apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Vertical wafer boat

Coating apparatus – Gas or vapor deposition – Work support
Patent

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