Installation for depositing, by means of a microwave plasma,...
Integrated electrostatic inductive coupling for plasma...
Integrated ion implant scrubber system
Integrated power oscillator RF source of plasma immersion...
Integrated precursor delivery system
Ion beam deposition apparatus
Ion beam source with gas introduced directly into...
Ion bombardment device with high frequency
Ion flow forming method and apparatus
Ion implantation control using charge collection, optical emissi
Ion implantation ion source, system and method
Ion implantation ion source, system and method
Ion implanters for implanting shallow regions with ion dopant co
Ion plating apparatus that prevents wasteful consumption of evap
Ion plating device and ion plating method
Ionization deposition apparatus
Ionizer for gas cluster ion beam formation