Apparatus with layered microwave window used in microwave plasma
Arc resistant high voltage feedthru fitting for a vacuum...
Arc suppression
Arc suppression in a plasma processing system
Arrangement for coating or etching substrates
Assembly for controlling the gas flow in a plasma spraying...
Assembly for the manufacture of highly integrated circuits on a
Atmospheric gas generator for heat treatment
Atom collimator
Atomic layer deposition method and semiconductor device...
Atomic layer deposition reactor
Automatic tuning in a tapped RF transformer inductive source...
Auxiliary vacuum chamber and vacuum processing unit using same