Arc suppression

Details Arc suppression Arc suppression

2006-05-05

2011-10-11

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345280, C156S345430, C156S345440, C315S111210, C315S111510, C315S111710, C204S298080

Reexamination Certificate

active

08033246

ABSTRACT:
An arc suppression arrangement suppresses arcs in a gas discharge device that is operated with an alternating voltage from a power supply. The arc suppression arrangement includes an arc suppression device and an arc identification device that controls the arc suppression device. The arc suppression device includes at least one controllable resistor that is connected in series in an electrical line that extends from an alternating voltage source to an electrode of the gas discharge device. An arc can thereby be prevented from being provided with energy.

REFERENCES:
patent: 5066894 (1991-11-01), Klier
patent: 5192894 (1993-03-01), Teschner
patent: 5281321 (1994-01-01), Sturmer et al.
patent: 5303139 (1994-04-01), Mark
patent: 5576939 (1996-11-01), Drummond
patent: 5584972 (1996-12-01), Lantsman
patent: 5584974 (1996-12-01), Sellers
patent: 5611899 (1997-03-01), Maass
patent: 5698082 (1997-12-01), Teschner et al.
patent: 5807470 (1998-09-01), Szczyrbowski et al.
patent: 5815388 (1998-09-01), Manley et al.
patent: 5882492 (1999-03-01), Manley et al.
patent: 5910886 (1999-06-01), Coleman
patent: 6011704 (2000-01-01), Coleman
patent: 6096174 (2000-08-01), Teschner et al.
patent: 6621674 (2003-09-01), Zahringer et al.
patent: 6735099 (2004-05-01), Mark
patent: 7305311 (2007-12-01), van Zyl
patent: 7531070 (2009-05-01), Kuriyama et al.
patent: 7586210 (2009-09-01), Wiedemuth et al.
patent: 2003/0174526 (2003-09-01), Mark
patent: 2006/0032738 (2006-02-01), Wiedemuth et al.
patent: 2007/0241287 (2007-10-01), Eyhorn et al.
patent: 4 127 505 (1993-02-01), None
patent: 19834719 (2000-02-01), None
patent: 10306347 (2004-08-01), None
patent: 1 441 576 (2004-07-01), None
patent: 55145170 (1980-11-01), None
patent: 58045379 (1983-03-01), None
patent: 06-119997 (1994-04-01), None
patent: 2003268541 (2003-09-01), None
patent: 9730468 (1997-08-01), None
patent: WO 03/030345 (2003-10-01), None
patent: WO 2004/072754 (2004-08-01), None
patent: WO 2005/020273 (2005-03-01), None
English translation of Office Action from corresponding Japanese Application No. 2006-129601, mailed Jun. 22, 2009, 10 pages.
Office Action from corresponding Japanese Application No. 2006-129601, mailed Feb. 20, 2009, 5 pages.
Anderson et al., “Process Control Requirements for Uniform Large Area Coatings”, Society of Vacuum Coaters, 45th Annual Technical Conference Proceedings, 2002, pp. 148-152.
Rettich et al., “High Power Generators for Medium Frequency Sputtering Applications”, Society of Vacuum Coaters, 40th Annual Technical Conference Proceedings, 1997, pp. 135-138.
Rettich et al., “Arc Management in DC and MF Generators for Large Area Coating Systems”, Society of Vacuum Coaters, 47th Annual Technical Conference Proceedings, 2004, pp. 237-240.
Office Action from corresponding Taiwanese Application No. 095116099, issued Jan. 21, 2010, with English Translation, 10 pages.
Office Action from corresponding European Application No. 05009875.5, dated Aug. 13, 2010, with English translation, 6 pages.

Affiliated with

Also associated with

Rating

Arc suppression does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Arc suppression, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Arc suppression will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4282331